Noise Analysis of MEMS Microphones as a Gas-Sensing Element
In recent years, micromachined microphones have evolved into versatile transducers for gas-sensing applications in the fields of both direct and indirect photoacoustics. However, their noise properties have not yet caught much attention. In this contribution, we present an analysis of the noise spec...
Main Authors: | , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2024-04-01
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Series: | Proceedings |
Subjects: | |
Online Access: | https://www.mdpi.com/2504-3900/97/1/129 |