Noise Analysis of MEMS Microphones as a Gas-Sensing Element

In recent years, micromachined microphones have evolved into versatile transducers for gas-sensing applications in the fields of both direct and indirect photoacoustics. However, their noise properties have not yet caught much attention. In this contribution, we present an analysis of the noise spec...

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Bibliographic Details
Main Authors: Gabriel Rodriguez Gutierrez, Stefan Palzer
Format: Article
Language:English
Published: MDPI AG 2024-04-01
Series:Proceedings
Subjects:
Online Access:https://www.mdpi.com/2504-3900/97/1/129