Temperature Stable Piezoelectric Imprint of Epitaxial Grown PZT for Zero-Bias Driving MEMS Actuator Operation
In piezoelectric transducer applications, it is common to use a unipolar operation signal to avoid switching of the polarisation and the resulting nonlinearities of micro-electromechanical systems. However, semi-bipolar or bipolar operation signals have the advantages of less leakage current, lower...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-10-01
|
| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/13/10/1705 |