Effect of electron-beam treatment of sensor glass substrates for SPR devices on their metrological characteristics
Electron-beam treatment the glass substrates for sensitive elements of SPR devices causes almost two-fold narrowing their refractometric characteristics from 0.867 down to 0.453 deg. The angular shift was also changed, which made the measuring range wider by 0.37 deg. The sensitivity of SPR devices...
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| Format: | Article |
| Language: | English |
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National Academy of Sciences of Ukraine. Institute of Semi conductor physics.
2019-11-01
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| Series: | Semiconductor Physics, Quantum Electronics & Optoelectronics |
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| Online Access: | http://journal-spqeo.org.ua/n4_2019/P444-451abstr.html |