Copper removal from semiconductor CMP wastewater in the presence of nano-SiO2 through biosorption

Copper removal from semiconductor CMP wastewater in the presence of nano-SiO2 through biosorption

Copper-bearing wastewater from chemical mechanical planarization (CMP) is a typical semiconductor development byproduct. How to effectively treat Cu2+ in the CMP wastewater is a great concern in the microchip manufacturing industry. In this study, we investigated the potential for the microbial remo...

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Bibliographic Details
Main Authors:	Xiaoyu Wang, Gude Buer, Wei Fan, Lei Gao, Mingxin Huo
Format:	Article
Language:	English
Published:	IWA Publishing 2021-06-01
Series:	Water Reuse
Subjects:	batch and packed column biosorption chemical mechanical planarization metal-resistant bacteria
Online Access:	http://jwrd.iwaponline.com/content/11/2/289

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