A High Temperature Capacitive Humidity Sensor Based on Mesoporous Silica

Capacitive sensors are the most commonly used devices for the detection of humidity because they are inexpensive and the detection mechanism is very specific for humidity. However, especially for industrial processes, there is a lack of dielectrics that are stable at high temperature (>200 °C...

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Bibliographic Details
Main Authors: Michael Tiemann, Jan Roggenbuck, Sören Krotzky, Claus-Dieter Kohl, Tilman Sauerwald, Alexander Weiß, Thorsten Wagner
Format: Article
Language:English
Published: MDPI AG 2011-03-01
Series:Sensors
Subjects:
Online Access:http://www.mdpi.com/1424-8220/11/3/3135/