A High Temperature Capacitive Humidity Sensor Based on Mesoporous Silica

Capacitive sensors are the most commonly used devices for the detection of humidity because they are inexpensive and the detection mechanism is very specific for humidity. However, especially for industrial processes, there is a lack of dielectrics that are stable at high temperature (>200 °C...

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Main Authors: Michael Tiemann, Jan Roggenbuck, Sören Krotzky, Claus-Dieter Kohl, Tilman Sauerwald, Alexander Weiß, Thorsten Wagner
Format: Article
Language:English
Published: MDPI AG 2011-03-01
Series:Sensors
Subjects:
Online Access:http://www.mdpi.com/1424-8220/11/3/3135/
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author Michael Tiemann
Jan Roggenbuck
Sören Krotzky
Claus-Dieter Kohl
Tilman Sauerwald
Alexander Weiß
Thorsten Wagner
author_facet Michael Tiemann
Jan Roggenbuck
Sören Krotzky
Claus-Dieter Kohl
Tilman Sauerwald
Alexander Weiß
Thorsten Wagner
author_sort Michael Tiemann
collection DOAJ
description Capacitive sensors are the most commonly used devices for the detection of humidity because they are inexpensive and the detection mechanism is very specific for humidity. However, especially for industrial processes, there is a lack of dielectrics that are stable at high temperature (>200 °C) and under harsh conditions. We present a capacitive sensor based on mesoporous silica as the dielectric in a simple sensor design based on pressed silica pellets. Investigation of the structural stability of the porous silica under simulated operating conditions as well as the influence of the pellet production will be shown. Impedance measurements demonstrate the utility of the sensor at both low (90 °C) and high (up to 210 °C) operating temperatures.
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spelling doaj.art-60ce0a92fc0d485585d8c0b0276ed2b62022-12-22T04:23:03ZengMDPI AGSensors1424-82202011-03-011133135314410.3390/s110303135A High Temperature Capacitive Humidity Sensor Based on Mesoporous SilicaMichael TiemannJan RoggenbuckSören KrotzkyClaus-Dieter KohlTilman SauerwaldAlexander WeißThorsten WagnerCapacitive sensors are the most commonly used devices for the detection of humidity because they are inexpensive and the detection mechanism is very specific for humidity. However, especially for industrial processes, there is a lack of dielectrics that are stable at high temperature (>200 °C) and under harsh conditions. We present a capacitive sensor based on mesoporous silica as the dielectric in a simple sensor design based on pressed silica pellets. Investigation of the structural stability of the porous silica under simulated operating conditions as well as the influence of the pellet production will be shown. Impedance measurements demonstrate the utility of the sensor at both low (90 °C) and high (up to 210 °C) operating temperatures.http://www.mdpi.com/1424-8220/11/3/3135/capacitive sensorhumidityhigh temperaturemesoporous silica
spellingShingle Michael Tiemann
Jan Roggenbuck
Sören Krotzky
Claus-Dieter Kohl
Tilman Sauerwald
Alexander Weiß
Thorsten Wagner
A High Temperature Capacitive Humidity Sensor Based on Mesoporous Silica
Sensors
capacitive sensor
humidity
high temperature
mesoporous silica
title A High Temperature Capacitive Humidity Sensor Based on Mesoporous Silica
title_full A High Temperature Capacitive Humidity Sensor Based on Mesoporous Silica
title_fullStr A High Temperature Capacitive Humidity Sensor Based on Mesoporous Silica
title_full_unstemmed A High Temperature Capacitive Humidity Sensor Based on Mesoporous Silica
title_short A High Temperature Capacitive Humidity Sensor Based on Mesoporous Silica
title_sort high temperature capacitive humidity sensor based on mesoporous silica
topic capacitive sensor
humidity
high temperature
mesoporous silica
url http://www.mdpi.com/1424-8220/11/3/3135/
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