SU-8 as a Material for Microfabricated Particle Physics Detectors

Several recent detector technologies developed for particle physics applications are based on microfabricated structures. Detectors built with this approach generally exhibit the overall best performance in terms of spatial and time resolution. Many properties of the SU-8 photoepoxy make it suitable...

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Bibliographic Details
Main Authors: Pietro Maoddi, Alessandro Mapelli, Sebastien Jiguet, Philippe Renaud
Format: Article
Language:English
Published: MDPI AG 2014-08-01
Series:Micromachines
Subjects:
Online Access:http://www.mdpi.com/2072-666X/5/3/594