SU-8 as a Material for Microfabricated Particle Physics Detectors
Several recent detector technologies developed for particle physics applications are based on microfabricated structures. Detectors built with this approach generally exhibit the overall best performance in terms of spatial and time resolution. Many properties of the SU-8 photoepoxy make it suitable...
Main Authors: | , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
MDPI AG
2014-08-01
|
Series: | Micromachines |
Subjects: | |
Online Access: | http://www.mdpi.com/2072-666X/5/3/594 |