SU-8 as a Material for Microfabricated Particle Physics Detectors
Several recent detector technologies developed for particle physics applications are based on microfabricated structures. Detectors built with this approach generally exhibit the overall best performance in terms of spatial and time resolution. Many properties of the SU-8 photoepoxy make it suitable...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2014-08-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | http://www.mdpi.com/2072-666X/5/3/594 |
| _version_ | 1818943678348001280 |
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| author | Pietro Maoddi Alessandro Mapelli Sebastien Jiguet Philippe Renaud |
| author_facet | Pietro Maoddi Alessandro Mapelli Sebastien Jiguet Philippe Renaud |
| author_sort | Pietro Maoddi |
| collection | DOAJ |
| description | Several recent detector technologies developed for particle physics applications are based on microfabricated structures. Detectors built with this approach generally exhibit the overall best performance in terms of spatial and time resolution. Many properties of the SU-8 photoepoxy make it suitable for the manufacturing of microstructured particle detectors. This article aims to review some emerging detector technologies making use of SU-8 microstructuring, namely micropattern gaseous detectors and microfluidic scintillation detectors. The general working principle and main process steps for the fabrication of each device are reported, with a focus on the advantages brought to the device functionality by the use of SU-8. A novel process based on multiple bonding steps for the fabrication of thin multilayer microfluidic scintillation detectors developed by the authors is presented. Finally, a brief overview of the applications for the discussed devices is given. |
| first_indexed | 2024-12-20T07:31:09Z |
| format | Article |
| id | doaj.art-6134efe6507c4668a1928781ab13a386 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-12-20T07:31:09Z |
| publishDate | 2014-08-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-6134efe6507c4668a1928781ab13a3862022-12-21T19:48:25ZengMDPI AGMicromachines2072-666X2014-08-015359460610.3390/mi5030594mi5030594SU-8 as a Material for Microfabricated Particle Physics DetectorsPietro Maoddi0Alessandro Mapelli1Sebastien Jiguet2Philippe Renaud3Physics Department, European Organization for Nuclear Research (CERN), CH-1211 Geneva 23, SwitzerlandPhysics Department, European Organization for Nuclear Research (CERN), CH-1211 Geneva 23, SwitzerlandGersteltec Sàrl, General-Guisan 26, CH-1009 Pully, SwitzerlandMicrosystems Laboratory, École Polytechnique Fédérale de Lausanne (EPFL), Station 17, CH-1015 Lausanne, SwitzerlandSeveral recent detector technologies developed for particle physics applications are based on microfabricated structures. Detectors built with this approach generally exhibit the overall best performance in terms of spatial and time resolution. Many properties of the SU-8 photoepoxy make it suitable for the manufacturing of microstructured particle detectors. This article aims to review some emerging detector technologies making use of SU-8 microstructuring, namely micropattern gaseous detectors and microfluidic scintillation detectors. The general working principle and main process steps for the fabrication of each device are reported, with a focus on the advantages brought to the device functionality by the use of SU-8. A novel process based on multiple bonding steps for the fabrication of thin multilayer microfluidic scintillation detectors developed by the authors is presented. Finally, a brief overview of the applications for the discussed devices is given.http://www.mdpi.com/2072-666X/5/3/594SU-8particle detectorsmicropattern gaseous detectorsMicromegasmicrofluidicsscintillation detectorsmicrofluidic scintillation detectors |
| spellingShingle | Pietro Maoddi Alessandro Mapelli Sebastien Jiguet Philippe Renaud SU-8 as a Material for Microfabricated Particle Physics Detectors Micromachines SU-8 particle detectors micropattern gaseous detectors Micromegas microfluidics scintillation detectors microfluidic scintillation detectors |
| title | SU-8 as a Material for Microfabricated Particle Physics Detectors |
| title_full | SU-8 as a Material for Microfabricated Particle Physics Detectors |
| title_fullStr | SU-8 as a Material for Microfabricated Particle Physics Detectors |
| title_full_unstemmed | SU-8 as a Material for Microfabricated Particle Physics Detectors |
| title_short | SU-8 as a Material for Microfabricated Particle Physics Detectors |
| title_sort | su 8 as a material for microfabricated particle physics detectors |
| topic | SU-8 particle detectors micropattern gaseous detectors Micromegas microfluidics scintillation detectors microfluidic scintillation detectors |
| url | http://www.mdpi.com/2072-666X/5/3/594 |
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