Tailoring the Hybrid Magnetron Sputtering Process (HiPIMS and dcMS) to Manufacture Ceramic Multilayers: Powering Conditions, Target Materials, and Base Layers

Tailoring the Hybrid Magnetron Sputtering Process (HiPIMS and dcMS) to Manufacture Ceramic Multilayers: Powering Conditions, Target Materials, and Base Layers

The mechanical and wear behavior of CrN/CrAlN multilayers were improved by tailoring the experimental conditions of a hybrid magnetron sputtering process based on a high-power impulse (HiPIMS) and two direct current magnetron sputtering (dcMS) power supplies. To this end, the influence of the base l...

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Bibliographic Details
Main Authors: Bruno César Noronha Marques de Castilho, Felipe de Sousa Mazuco, Alisson Mendes Rodrigues, Pedro Renato Tavares Avila, Raira Chefer Apolinario, Philipp Daum, Fabiana Pereira da Costa, Romualdo Rodrigues Menezes, Gelmires de Araújo Neves, Christian Greiner, Haroldo Cavalcanti Pinto
Format: Article
Language:English
Published: MDPI AG 2022-07-01
Series:Nanomaterials
Subjects:
ceramic multilayers
hybrid magnetron sputtering
HiPIMS
dcMS
mechanical properties
wear
Online Access:https://www.mdpi.com/2079-4991/12/14/2465

Internet

https://www.mdpi.com/2079-4991/12/14/2465

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