A Machine Learning Approach for Improving Wafer Acceptance Testing Based on an Analysis of Station and Equipment Combinations
Semiconductor manufacturing is a complex and lengthy process. Even with their expertise and experience, engineers often cannot quickly identify anomalies in an extensive database. Most research into equipment combinations has focused on the manufacturing process’s efficiency, quality, and cost issue...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2023-03-01
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| Series: | Mathematics |
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| Online Access: | https://www.mdpi.com/2227-7390/11/7/1569 |