Simplified Method of Microcontact Force Measurement by Using Micropressure Sensor
Microcontact force measurement is widely applied in micro/nano manufacturing, medicine and microelectromechanical systems. Most microcontact force measurements are performed by using mass comparators, nano-indenter and precision electronic balance, and weighing sensors. However, these instruments ha...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-05-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/12/5/515 |