Hybrid integration methodology for quantum cascade lasers with germanium waveguides in mid-IR
Mid-infrared quantum cascade lasers (QCLs) operating around 5.7 μm have been integrated with germanium waveguides on silicon substrates. QCL bars have been designed and fabricated at the University of Sheffield for the purpose of integration. This hybrid approach uses flip-chip technology that has b...
| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2022-01-01
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| Series: | EPJ Web of Conferences |
| Online Access: | https://www.epj-conferences.org/articles/epjconf/pdf/2022/10/epjconf_eosam2022_01008.pdf |