Improvement of the magnetic properties of Nd–Fe–B/glass two-layer films deposited on Si substrates

In a previous study, the authors developed Nd–Fe–B/glass two-layer films deposited on Si substrates using pulsed laser deposition for micro electro mechanical systems. Here, the fabrication conditions of the films were investigated to determine the optimum conditions that enhance the magnetic proper...

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Bibliographic Details
Main Authors: M. Nakano, K. Higuchi, H. Yamaguchi, I. Fukuda, A. Yamashita, T. Yanai, T. Shinshi, H. Fukunaga
Format: Article
Language:English
Published: AIP Publishing LLC 2023-02-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/9.0000599