Improvement of the magnetic properties of Nd–Fe–B/glass two-layer films deposited on Si substrates
In a previous study, the authors developed Nd–Fe–B/glass two-layer films deposited on Si substrates using pulsed laser deposition for micro electro mechanical systems. Here, the fabrication conditions of the films were investigated to determine the optimum conditions that enhance the magnetic proper...
Main Authors: | M. Nakano, K. Higuchi, H. Yamaguchi, I. Fukuda, A. Yamashita, T. Yanai, T. Shinshi, H. Fukunaga |
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Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2023-02-01
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Series: | AIP Advances |
Online Access: | http://dx.doi.org/10.1063/9.0000599 |
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