Investigation of the physical properties of nanoscale porous silicon films
The structure and physical properties of porous silicon obtained by electrochemical etching of monocrystalline silicon with n-type conductivity in a mixture of hydrofluoric acid and ethyl alcohol were investigated. Experimental layers were formed by varying the etching parameters. Samples were studi...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Al-Farabi Kazakh National University
2016-10-01
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| Series: | Physical Sciences and Technology |
| Subjects: | |
| Online Access: | http://phst/index.php/journal/article/view/54 |