Low-Noise Readout Circuit for an Automotive MEMS Accelerometer
This paper presents a charge-balanced readout circuit for MEMS capacitive accelerometers. The focus of this work is a design with a low-noise and low area consumption while ensuring the essential linearity and electromagnetic compatibility (EMC) for automotive applications. The readout circuit is co...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2021-01-01
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| Series: | IEEE Open Journal of the Solid-State Circuits Society |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9551692/ |