Development of a Prototype Miniature Silicon Microgyroscope

Development of a Prototype Miniature Silicon Microgyroscope

A miniature vacuum-packaged silicon microgyroscope (SMG) with symmetrical and decoupled structure was designed to prevent unintended coupling between drive and sense modes. To ensure high resonant stability and strong disturbance resisting capacity, a self-oscillating closed-loop circuit including a...

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Bibliographic Details
Main Authors: Shuling Chen, Dunzhu Xia, Shourong Wang
Format: Article
Language:English
Published: MDPI AG 2009-06-01
Series:Sensors
Subjects:
silicon microgyroscope (SMG)
self-oscillating
dual-channel closed-loop
scale factor
zero bias stability
temperature compensation
miniature prototype
Online Access:http://www.mdpi.com/1424-8220/9/6/4586/

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http://www.mdpi.com/1424-8220/9/6/4586/

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