Development of a Parallel Dual-Stage Compliant Nanopositioning System

Development of a Parallel Dual-Stage Compliant Nanopositioning System

This paper presents a novel parallel dual-stage compliant nanopositioning system (PDCNS), aimed at nanoscale positioning for microscale manipulation. In the developed PDCNS, the coarse stage actuated by the voice coil motor and the fine stage driven by the piezoelectric actuator are integrated in a...

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Bibliographic Details
Main Authors: Xu Yang, Lichao Ji, Ying Shang, Wule Zhu, Shizhen Li
Format: Article
Language:English
Published: MDPI AG 2022-05-01
Series:Actuators
Subjects:
nanopositioning system
microscale manipulation
compliant mechanism
double-servo cooperative control
Online Access:https://www.mdpi.com/2076-0825/11/5/136

Internet

https://www.mdpi.com/2076-0825/11/5/136

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