Development of a Parallel Dual-Stage Compliant Nanopositioning System
This paper presents a novel parallel dual-stage compliant nanopositioning system (PDCNS), aimed at nanoscale positioning for microscale manipulation. In the developed PDCNS, the coarse stage actuated by the voice coil motor and the fine stage driven by the piezoelectric actuator are integrated in a...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-05-01
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| Series: | Actuators |
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| Online Access: | https://www.mdpi.com/2076-0825/11/5/136 |
| _version_ | 1797502381807632384 |
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| author | Xu Yang Lichao Ji Ying Shang Wule Zhu Shizhen Li |
| author_facet | Xu Yang Lichao Ji Ying Shang Wule Zhu Shizhen Li |
| author_sort | Xu Yang |
| collection | DOAJ |
| description | This paper presents a novel parallel dual-stage compliant nanopositioning system (PDCNS), aimed at nanoscale positioning for microscale manipulation. In the developed PDCNS, the coarse stage actuated by the voice coil motor and the fine stage driven by the piezoelectric actuator are integrated in a parallel manner by a specially devised A-shaped compliant mechanism, which leads to many excellent performances, such as good resolution and large stroke and broadband. To enhance the closed-loop-positioning capability of the proposed PDCNS, a double-servo cooperative control (DSCC) strategy is specially constructed. The performance of the proposed PDCNS is evaluated by analytical model, finite element analysis, and experimental research. Results show that the first-order resonance frequency of the designed A-shaped compliant mechanism can reach 99.7 Hz. Combined with the designed DSCC, the developed PDCNS prototype is demonstrated to provide a stroke of 1.49 mm and a positioning resolution of ≤50 nm. |
| first_indexed | 2024-03-10T03:32:18Z |
| format | Article |
| id | doaj.art-6244c5065eb5421096752aac94dab2d4 |
| institution | Directory Open Access Journal |
| issn | 2076-0825 |
| language | English |
| last_indexed | 2024-03-10T03:32:18Z |
| publishDate | 2022-05-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Actuators |
| spelling | doaj.art-6244c5065eb5421096752aac94dab2d42023-11-23T09:37:21ZengMDPI AGActuators2076-08252022-05-0111513610.3390/act11050136Development of a Parallel Dual-Stage Compliant Nanopositioning SystemXu Yang0Lichao Ji1Ying Shang2Wule Zhu3Shizhen Li4Institute of Marine Science and Technology, Shandong University, Qingdao 266237, ChinaInstitute of Marine Science and Technology, Shandong University, Qingdao 266237, ChinaLaser Institute, Qilu University of Technology, Jinan 250353, ChinaState Key Laboratory of Fluid Power and Mechatronic Systems, Zhejiang University, Hangzhou 310027, ChinaInstitute of Marine Science and Technology, Shandong University, Qingdao 266237, ChinaThis paper presents a novel parallel dual-stage compliant nanopositioning system (PDCNS), aimed at nanoscale positioning for microscale manipulation. In the developed PDCNS, the coarse stage actuated by the voice coil motor and the fine stage driven by the piezoelectric actuator are integrated in a parallel manner by a specially devised A-shaped compliant mechanism, which leads to many excellent performances, such as good resolution and large stroke and broadband. To enhance the closed-loop-positioning capability of the proposed PDCNS, a double-servo cooperative control (DSCC) strategy is specially constructed. The performance of the proposed PDCNS is evaluated by analytical model, finite element analysis, and experimental research. Results show that the first-order resonance frequency of the designed A-shaped compliant mechanism can reach 99.7 Hz. Combined with the designed DSCC, the developed PDCNS prototype is demonstrated to provide a stroke of 1.49 mm and a positioning resolution of ≤50 nm.https://www.mdpi.com/2076-0825/11/5/136nanopositioning systemmicroscale manipulationcompliant mechanismdouble-servo cooperative control |
| spellingShingle | Xu Yang Lichao Ji Ying Shang Wule Zhu Shizhen Li Development of a Parallel Dual-Stage Compliant Nanopositioning System Actuators nanopositioning system microscale manipulation compliant mechanism double-servo cooperative control |
| title | Development of a Parallel Dual-Stage Compliant Nanopositioning System |
| title_full | Development of a Parallel Dual-Stage Compliant Nanopositioning System |
| title_fullStr | Development of a Parallel Dual-Stage Compliant Nanopositioning System |
| title_full_unstemmed | Development of a Parallel Dual-Stage Compliant Nanopositioning System |
| title_short | Development of a Parallel Dual-Stage Compliant Nanopositioning System |
| title_sort | development of a parallel dual stage compliant nanopositioning system |
| topic | nanopositioning system microscale manipulation compliant mechanism double-servo cooperative control |
| url | https://www.mdpi.com/2076-0825/11/5/136 |
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