Development of a Parallel Dual-Stage Compliant Nanopositioning System
This paper presents a novel parallel dual-stage compliant nanopositioning system (PDCNS), aimed at nanoscale positioning for microscale manipulation. In the developed PDCNS, the coarse stage actuated by the voice coil motor and the fine stage driven by the piezoelectric actuator are integrated in a...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-05-01
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| Series: | Actuators |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-0825/11/5/136 |