Weak Capacitance Detection Circuit of Micro-Hemispherical Gyroscope Based on Common-Mode Feedback Fusion Modulation and Demodulation

Weak Capacitance Detection Circuit of Micro-Hemispherical Gyroscope Based on Common-Mode Feedback Fusion Modulation and Demodulation

As an effective capacitance signal produced by a micro-hemisphere gyro is usually below the pF level, and the capacitance reading process is susceptible to parasitic capacitance and environmental noise, it is highly difficult to acquire an effective capacitance signal. Reducing and suppressing noise...

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Bibliographic Details
Main Authors: Xiaoyang Zhang, Pinghua Li, Xuye Zhuang, Yunlong Sheng, Jinghao Liu, Zhongfeng Gao, Zhiyu Yu
Format: Article
Language:English
Published: MDPI AG 2023-05-01
Series:Micromachines
Subjects:
hemispherical resonant gyro
common-mode feedback
micro-capacitor detection
low noise
Online Access:https://www.mdpi.com/2072-666X/14/6/1161

Internet

https://www.mdpi.com/2072-666X/14/6/1161

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