Identification of Self-Buffer Layer on GaN/glass Films Grown by Reactive Sputtering

Identification of Self-Buffer Layer on GaN/glass Films Grown by Reactive Sputtering

This work reports on the properties of GaN films grown by reactive magnetron sputtering onto glass substrate kept at relatively low temperature (400°C), using different RF power applied to the Ga target. Their structural, morphological, vibrational and optical properties were characterized by X-ray...

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Bibliographic Details
Main Authors: R. S. de Oliveira, H. A. Folli, I. M. Horta, B. S. Damasceno, J. H. C. Augstrose, W. Miyakawa, A. L. J. Pereira, M. Massi, A. S. da Silva Sobrinho, D. M. G. Leite
Format: Article
Language:English
Published: Associação Brasileira de Metalurgia e Materiais (ABM); Associação Brasileira de Cerâmica (ABC); Associação Brasileira de Polímeros (ABPol) 2023-07-01
Series:Materials Research
Subjects:
GaN
reactive sputtering
buffer layer
glass substrate
Online Access:http://www.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392023000100282&tlng=en

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http://www.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392023000100282&tlng=en

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