Flexible Capacitive Pressure Sensor Based on a Double-Sided Microstructure Porous Dielectric Layer
In the era of intelligent sensing, there is a huge demand for flexible pressure sensors. High sensitivity is the primary requirement for flexible pressure sensors, whereas pressure response range and resolution, which are also key parameters of sensors, are often ignored, resulting in limited applic...
Main Authors: | , |
---|---|
Format: | Article |
Language: | English |
Published: |
MDPI AG
2022-12-01
|
Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/14/1/111 |