Flexible Capacitive Pressure Sensor Based on a Double-Sided Microstructure Porous Dielectric Layer

In the era of intelligent sensing, there is a huge demand for flexible pressure sensors. High sensitivity is the primary requirement for flexible pressure sensors, whereas pressure response range and resolution, which are also key parameters of sensors, are often ignored, resulting in limited applic...

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Bibliographic Details
Main Authors: Qingyang Yu, Jian Zhang
Format: Article
Language:English
Published: MDPI AG 2022-12-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/14/1/111