Two-dimensional displacement sensors with angstrom-scale resolution based on optical slot antenna arrays
Optical displacement sensing with high resolution and noncontact detection plays an important role in nanometrology, nanofabrication, and super-resolution microscopy. However, displacement sensing along an arbitrary direction in a two-dimensional (2D) plane with angstrom-level precision remains chal...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2022-05-01
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| Series: | APL Photonics |
| Online Access: | http://dx.doi.org/10.1063/5.0084400 |