ScAlN Film-Based Piezoelectric Micromechanical Ultrasonic Transducers with Dual-Ring Structure for Distance Sensing

ScAlN Film-Based Piezoelectric Micromechanical Ultrasonic Transducers with Dual-Ring Structure for Distance Sensing

Piezoelectric micromechanical ultrasonic transducers (pMUTs) are new types of distance sensors with great potential for applications in automotive, unmanned aerial vehicle, robotics, and smart homes. However, previously reported pMUTs are limited by a short sensing distance due to lower output sound...

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Bibliographic Details
Main Authors: Yuchao Zhang, Bin Miao, Guanghua Wang, Hongyu Zhou, Shiqin Zhang, Yimin Hu, Junfeng Wu, Xuechao Yu, Jiadong Li
Format: Article
Language:English
Published: MDPI AG 2023-02-01
Series:Micromachines
Subjects:
piezoelectric micromechanical ultrasonic transducer (pMUT)
distance sensors
scandium-doped aluminum nitride (ScAlN)
dual-ring structure
Online Access:https://www.mdpi.com/2072-666X/14/3/516

Internet

https://www.mdpi.com/2072-666X/14/3/516

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