Perspective: Oxide molecular-beam epitaxy rocks!

Molecular-beam epitaxy (MBE) is the “gold standard” synthesis technique for preparing semiconductor heterostructures with high purity, high mobility, and exquisite control of layer thickness at the atomic-layer level. Its use for the growth of multicomponent oxides got off to a rocky start 30 yr ago...

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Bibliographic Details
Main Author: Darrell G. Schlom
Format: Article
Language:English
Published: AIP Publishing LLC 2015-06-01
Series:APL Materials
Online Access:http://dx.doi.org/10.1063/1.4919763