Perspective: Oxide molecular-beam epitaxy rocks!
Molecular-beam epitaxy (MBE) is the “gold standard” synthesis technique for preparing semiconductor heterostructures with high purity, high mobility, and exquisite control of layer thickness at the atomic-layer level. Its use for the growth of multicomponent oxides got off to a rocky start 30 yr ago...
Main Author: | Darrell G. Schlom |
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Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2015-06-01
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Series: | APL Materials |
Online Access: | http://dx.doi.org/10.1063/1.4919763 |
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