A Sensitive and Flexible Capacitive Pressure Sensor Based on a Porous Hollow Hemisphere Dielectric Layer

A Sensitive and Flexible Capacitive Pressure Sensor Based on a Porous Hollow Hemisphere Dielectric Layer

Capacitive pressure sensors based on porous structures have been widely researched and applied to a variety of practical applications. To date, it remains a big challenge to develop a capacitive pressure sensor with a high sensitivity and good linearity over a wide pressure range. In this paper, a s...

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Bibliographic Details
Main Authors: Haoao Cui, Yijian Liu, Ruili Tang, Jie Ren, Liang Yao, Yuhao Cai, Da Chen
Format: Article
Language:English
Published: MDPI AG 2023-03-01
Series:Micromachines
Subjects:
capacitive pressure sensors
salt template method
porous structure
groove
high sensitivity
Online Access:https://www.mdpi.com/2072-666X/14/3/662

Internet

https://www.mdpi.com/2072-666X/14/3/662

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