Study on the Large Area Diamond Film Deposition in a Self- built Overmoded Microwave Power Chemical Vapor Deposition Device
With a self-built overmoded microwave plasma chemical vapor deposition device, the effect of the gas flow rate variation on the uniform deposition of diamond films on molybdenum of 100 millimeter diameter was studied. The plasma density was 1.0×1019/m3 when the microwave power was 5.0 kW and the gas...
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
AIDIC Servizi S.r.l.
2017-12-01
|
| Series: | Chemical Engineering Transactions |
| Online Access: | https://www.cetjournal.it/index.php/cet/article/view/987 |