Fabrication of Silicon Nanowires by Metal-Assisted Chemical Etching Combined with Micro-Vibration

Fabrication of Silicon Nanowires by Metal-Assisted Chemical Etching Combined with Micro-Vibration

In this work, we design a micro-vibration platform, which combined with the traditional metal-assisted chemical etching (MaCE) to etch silicon nanowires (SiNWs). The etching mechanism of SiNWs, including in the mass-transport (MT) and charge-transport (CT) processes, was explored through the charact...

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Bibliographic Details
Main Authors: Weiye Huang, Junyi Wu, Wenxin Li, Guojin Chen, Changyong Chu, Chao Li, Yucheng Zhu, Hui Yang, Yan Chao
Format: Article
Language:English
Published: MDPI AG 2023-08-01
Series:Materials
Subjects:
micro-vibration platform
MaCE
etching rate
amplitude
frequency
Online Access:https://www.mdpi.com/1996-1944/16/15/5483

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https://www.mdpi.com/1996-1944/16/15/5483

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