Probe card-Type multizone electrostatic chuck inspection system
Electrostatic chucks (ESCs) are major components of the equipment used to improve the production yield of wafers and temperature uniformity across wafer surfaces by controlling the wafer temperature precisely. However, ESCs are directly exposed to harsh environments, such as plasma, chemical gases,...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Taylor & Francis Group
2023-04-01
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| Series: | Automatika |
| Subjects: | |
| Online Access: | https://www.tandfonline.com/doi/10.1080/00051144.2023.2169157 |