Electrical Characteristics of Tin Oxide Films Grown by Thermal Atomic Layer Deposition
Tin dioxide (SnO2) is an n-type semiconductor and has useful characteristics of high transmittance, excellent electrical properties, and chemical stability. Accordingly, it is widely used in a variety of fields, such as a gas sensor, photocatalyst, optoelectronics, and solar cell. In this study, SnO...
Main Authors: | , |
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Format: | Article |
Language: | English |
Published: |
Polish Academy of Sciences
2020-07-01
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Series: | Archives of Metallurgy and Materials |
Subjects: | |
Online Access: | https://journals.pan.pl/Content/116379/PDF/AMM-2020-3-12-Byung%20Joon%20Choi.pdf |