Electrical Characteristics of Tin Oxide Films Grown by Thermal Atomic Layer Deposition

Tin dioxide (SnO2) is an n-type semiconductor and has useful characteristics of high transmittance, excellent electrical properties, and chemical stability. Accordingly, it is widely used in a variety of fields, such as a gas sensor, photocatalyst, optoelectronics, and solar cell. In this study, SnO...

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Bibliographic Details
Main Authors: Seong Yu Yoon, Byung Joon Choi
Format: Article
Language:English
Published: Polish Academy of Sciences 2020-07-01
Series:Archives of Metallurgy and Materials
Subjects:
Online Access:https://journals.pan.pl/Content/116379/PDF/AMM-2020-3-12-Byung%20Joon%20Choi.pdf