Deflection, Frequency, and Stress Characteristics of Rectangular, Triangular, and Step Profile Microcantilevers for Biosensors

This study presents the deflection, resonant frequency and stress results of rectangular, triangular, and step profile microcantilevers subject to surface stress. These cantilevers can be used as the sensing element in microcantilever biosensors. To increase the overall sensitivity of microcantileve...

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Bibliographic Details
Main Authors: Mohd Zahid Ansari, Chongdu Cho
Format: Article
Language:English
Published: MDPI AG 2009-07-01
Series:Sensors
Subjects:
Online Access:http://www.mdpi.com/1424-8220/9/8/6046/