An Efficient MEMS Sensor Modelling by Geometrical Parameter Optimization
Numerous technological applications use MEMS capacitive sensing technique as a major component, because of their ease of fabrication process, inexpensive and high sensitivity. The paper aims at modeling interdigitated capacitive (IDC) sensing. Virtually observe the contribution of variations in geom...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Polish Academy of Sciences
2022-06-01
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| Series: | International Journal of Electronics and Telecommunications |
| Subjects: | |
| Online Access: | https://journals.pan.pl/Content/123379/PDF/40-3396-Kulkarni-sk-b_new.pdf |