Developing Barbed Microtip-Based Electrode Arrays for Biopotential Measurement
This study involved fabricating barbed microtip-based electrode arrays by using silicon wet etching. KOH anisotropic wet etching was employed to form a standard pyramidal microtip array and HF/HNO3 isotropic etching was used to fabricate barbs on these microtips. To improve the electrical conductanc...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2014-07-01
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Series: | Sensors |
Subjects: | |
Online Access: | http://www.mdpi.com/1424-8220/14/7/12370 |