Widely Tuneable Composition and Crystallinity of Graded Na<sub>1+x</sub>TaO<sub>3±δ</sub> Thin Films Fabricated by Chemical Beam Vapor Deposition

Combinatorial approach has been widely recognized as a powerful strategy to develop new-higher performance materials and shed the light on the stoichiometry-dependent properties of known systems. Herein, we take advantage of the unique features of chemical beam vapor deposition to fabricate composit...

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Bibliographic Details
Main Authors: Corrado Garlisi, Petru Lunca Popa, Kevin Menguelti, Vincent Rogé, Marc Michel, Christèle Vergne, Jérôme Guillot, Estelle Wagner, William Maudez, Giacomo Benvenuti, Bianca Rita Pistillo, Emanuele Barborini
Format: Article
Language:English
Published: MDPI AG 2022-03-01
Series:Nanomaterials
Subjects:
Online Access:https://www.mdpi.com/2079-4991/12/6/1012