Low-Frequency Noise Characteristics in HfO<sub>2</sub>-Based Metal-Ferroelectric-Metal Capacitors
The transport mechanism of HfO<sub>2</sub>-based metal-ferroelectric-metal (MFM) capacitors was investigated using low-frequency noise (LFN) measurements for the first time. The current–voltage measurement results revealed that the leakage behavior of the fabricated MFM capacitor was cau...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-10-01
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| Series: | Materials |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1996-1944/15/21/7475 |