Characteristics of Bilayer Molybdenum Films Deposited Using RF Sputtering for Back Contact of Thin Film Solar Cells
Mo films prepared under a single deposition condition seldom simultaneously obtain a low resistivity and a good adhesion necessary for use in solar cells. In order to surmount the obstacle, bilayer Mo films using DC sputtering at a higher working pressure and a lower working pressure have been attem...
প্রধান লেখক: | , , , |
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বিন্যাস: | প্রবন্ধ |
ভাষা: | English |
প্রকাশিত: |
Wiley
2014-01-01
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মালা: | Advances in Materials Science and Engineering |
অনলাইন ব্যবহার করুন: | http://dx.doi.org/10.1155/2014/531401 |