Soft nanoimprint lithography on SiO2 sol-gel to elaborate sensitive substrates for SERS detection
This paper presents a new alternative fabrication of biochemical sensor based on surface enhanced Raman scattering (SERS) by soft nanoimprint lithography (S-NIL) on SiO2 sol-gel. Stabilization of the sol-gel film is obtained by annealing which simplifies the manufacturing of these biosensors and is...
Main Authors: | , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2017-12-01
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Series: | AIP Advances |
Online Access: | http://dx.doi.org/10.1063/1.5004122 |