Soft nanoimprint lithography on SiO2 sol-gel to elaborate sensitive substrates for SERS detection

This paper presents a new alternative fabrication of biochemical sensor based on surface enhanced Raman scattering (SERS) by soft nanoimprint lithography (S-NIL) on SiO2 sol-gel. Stabilization of the sol-gel film is obtained by annealing which simplifies the manufacturing of these biosensors and is...

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Main Authors: Frédéric Hamouda, Jean-François Bryche, Abdelhanin Aassime, Emmanuel Maillart, Valentin Gâté, Silvia Zanettini, Jérémy Ruscica, Daniel Turover, Bernard Bartenlian
Format: Article
Language:English
Published: AIP Publishing LLC 2017-12-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.5004122
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author Frédéric Hamouda
Jean-François Bryche
Abdelhanin Aassime
Emmanuel Maillart
Valentin Gâté
Silvia Zanettini
Jérémy Ruscica
Daniel Turover
Bernard Bartenlian
author_facet Frédéric Hamouda
Jean-François Bryche
Abdelhanin Aassime
Emmanuel Maillart
Valentin Gâté
Silvia Zanettini
Jérémy Ruscica
Daniel Turover
Bernard Bartenlian
author_sort Frédéric Hamouda
collection DOAJ
description This paper presents a new alternative fabrication of biochemical sensor based on surface enhanced Raman scattering (SERS) by soft nanoimprint lithography (S-NIL) on SiO2 sol-gel. Stabilization of the sol-gel film is obtained by annealing which simplifies the manufacturing of these biosensors and is compatible with mass production at low cost. This detector relies on a specific pattern of gold nanodisks on a thin gold film to obtain a better sensitivity of molecules’ detection. Characterizations of SERS devices were performed on a confocal Raman microspectrophotometer after a chemical functionalization. We report a lateral collapse effect on poly(diméthylsiloxane) (PDMS) stamp for specific nanostructure dimensions. This unintentional effect is used to evaluate S-NIL resolution in SiO2 sol-gel.
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spelling doaj.art-65ba43a38e3447db9722da4a1f879dc32022-12-22T01:17:39ZengAIP Publishing LLCAIP Advances2158-32262017-12-01712125125125125-610.1063/1.5004122107712ADVSoft nanoimprint lithography on SiO2 sol-gel to elaborate sensitive substrates for SERS detectionFrédéric Hamouda0Jean-François Bryche1Abdelhanin Aassime2Emmanuel Maillart3Valentin Gâté4Silvia Zanettini5Jérémy Ruscica6Daniel Turover7Bernard Bartenlian8Centre de Nanosciences et de Nanotechnologies, CNRS, Univ. Paris-Sud, Université Paris-Saclay, C2N – Orsay, 91405 Orsay cedex, FranceCentre de Nanosciences et de Nanotechnologies, CNRS, Univ. Paris-Sud, Université Paris-Saclay, C2N – Orsay, 91405 Orsay cedex, FranceCentre de Nanosciences et de Nanotechnologies, CNRS, Univ. Paris-Sud, Université Paris-Saclay, C2N – Orsay, 91405 Orsay cedex, FranceHORIBA Europe Research Center, Avenue de la Vauve, Passage Jobin Yvon, 91120 Palaiseau, FranceSILSEF, 382 rue Louis Rustin-Archamps Technopole, 74160 Archamps, FranceSILSEF, 382 rue Louis Rustin-Archamps Technopole, 74160 Archamps, FranceSILSEF, 382 rue Louis Rustin-Archamps Technopole, 74160 Archamps, FranceSILSEF, 382 rue Louis Rustin-Archamps Technopole, 74160 Archamps, FranceCentre de Nanosciences et de Nanotechnologies, CNRS, Univ. Paris-Sud, Université Paris-Saclay, C2N – Orsay, 91405 Orsay cedex, FranceThis paper presents a new alternative fabrication of biochemical sensor based on surface enhanced Raman scattering (SERS) by soft nanoimprint lithography (S-NIL) on SiO2 sol-gel. Stabilization of the sol-gel film is obtained by annealing which simplifies the manufacturing of these biosensors and is compatible with mass production at low cost. This detector relies on a specific pattern of gold nanodisks on a thin gold film to obtain a better sensitivity of molecules’ detection. Characterizations of SERS devices were performed on a confocal Raman microspectrophotometer after a chemical functionalization. We report a lateral collapse effect on poly(diméthylsiloxane) (PDMS) stamp for specific nanostructure dimensions. This unintentional effect is used to evaluate S-NIL resolution in SiO2 sol-gel.http://dx.doi.org/10.1063/1.5004122
spellingShingle Frédéric Hamouda
Jean-François Bryche
Abdelhanin Aassime
Emmanuel Maillart
Valentin Gâté
Silvia Zanettini
Jérémy Ruscica
Daniel Turover
Bernard Bartenlian
Soft nanoimprint lithography on SiO2 sol-gel to elaborate sensitive substrates for SERS detection
AIP Advances
title Soft nanoimprint lithography on SiO2 sol-gel to elaborate sensitive substrates for SERS detection
title_full Soft nanoimprint lithography on SiO2 sol-gel to elaborate sensitive substrates for SERS detection
title_fullStr Soft nanoimprint lithography on SiO2 sol-gel to elaborate sensitive substrates for SERS detection
title_full_unstemmed Soft nanoimprint lithography on SiO2 sol-gel to elaborate sensitive substrates for SERS detection
title_short Soft nanoimprint lithography on SiO2 sol-gel to elaborate sensitive substrates for SERS detection
title_sort soft nanoimprint lithography on sio2 sol gel to elaborate sensitive substrates for sers detection
url http://dx.doi.org/10.1063/1.5004122
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