Analytical modelling of the transient response of thermopile-based MEMS sensors
This work presents an analytical model dedicated to study of the transient response of multipurpose MEMS devices based on thermopile sensors. In general, thermopile sensors response depends on ambient temperature, thermal conductivity of the gas inside the housing and the pressure of the gas. The pr...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
University of Banja Luka
2015-12-01
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| Series: | Electronics |
| Subjects: | |
| Online Access: | http://electronics.etfbl.net/journal/Vol19No2/xPaper_06.pdf |