Analytical modelling of the transient response of thermopile-based MEMS sensors

Analytical modelling of the transient response of thermopile-based MEMS sensors

This work presents an analytical model dedicated to study of the transient response of multipurpose MEMS devices based on thermopile sensors. In general, thermopile sensors response depends on ambient temperature, thermal conductivity of the gas inside the housing and the pressure of the gas. The pr...

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Bibliographic Details
Main Authors:	D.V. Randjelović, A.G. Kozlov, O.M. Jakšić, M.M. Smiljanić, P.D. Poljak
Format:	Article
Language:	English
Published:	University of Banja Luka 2015-12-01
Series:	Electronics
Subjects:	analytical modelling MEMS sensors thermopile transient response
Online Access:	http://electronics.etfbl.net/journal/Vol19No2/xPaper_06.pdf

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