Inkjet-Printed Functionalization of CMUT-Based CO<sub>2</sub> Sensors

Inkjet-Printed Functionalization of CMUT-Based CO<sub>2</sub> Sensors

The trade-off between the functionalization shift of the informative parameters and sensitivity of capacitive micromachined ultrasound transducers (CMUT)-based CO<sub>2</sub> sensors is addressed, and the CMUT surface modification process by thin inkjet-printed polyethyleneimine (PEI) fi...

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Bibliographic Details
Main Authors: Dovydas Barauskas, Donatas Pelenis, Mindaugas Dzikaras, Marius Mikolajunas, Gailius Vanagas, Darius Virzonis
Format: Article
Language:English
Published: MDPI AG 2022-03-01
Series:Sensors
Subjects:
carbon dioxide sensing
capacitive micromachined ultrasound transducers
polyethyleneimine
silicon micromachining
inkjet printing
surface functionalization
Online Access:https://www.mdpi.com/1424-8220/22/6/2288

Internet

https://www.mdpi.com/1424-8220/22/6/2288

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