Inkjet-Printed Functionalization of CMUT-Based CO<sub>2</sub> Sensors
The trade-off between the functionalization shift of the informative parameters and sensitivity of capacitive micromachined ultrasound transducers (CMUT)-based CO<sub>2</sub> sensors is addressed, and the CMUT surface modification process by thin inkjet-printed polyethyleneimine (PEI) fi...
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-03-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/22/6/2288 |
| _version_ | 1797442367209340928 |
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| author | Dovydas Barauskas Donatas Pelenis Mindaugas Dzikaras Marius Mikolajunas Gailius Vanagas Darius Virzonis |
| author_facet | Dovydas Barauskas Donatas Pelenis Mindaugas Dzikaras Marius Mikolajunas Gailius Vanagas Darius Virzonis |
| author_sort | Dovydas Barauskas |
| collection | DOAJ |
| description | The trade-off between the functionalization shift of the informative parameters and sensitivity of capacitive micromachined ultrasound transducers (CMUT)-based CO<sub>2</sub> sensors is addressed, and the CMUT surface modification process by thin inkjet-printed polyethyleneimine (PEI) films is optimized. It was shown that by the proper preparation of the active CMUT surface and properly diluted PEI solution, it is possible to minimize the functionalization shift of the resonance frequency and the quality of the resonance and preserve the sensitivity potential. So, after optimization, we demonstrated 23.2 kHz frequency shift readings of the sensor with 16 MHz nominal frequency while in the gas chamber and switching between pure N<sub>2</sub> and CO<sub>2</sub>. After testing the sensors with different PEI film thickness, it was confirmed that a 200 nm average thickness of a PEI film is an optimum, because this is the practical limit of CO<sub>2</sub> absorption depth at given conditions. Additionally, we note that modification of the hydrophilic/hydrophobic properties of the CMUT surface allows changing the nanoscale surface roughness of the printed PEI film and controlling the area resolution of the inkjet functionalization by reducing the diameter of a single dot down to 150 μm by a commercially available printer cartridge. |
| first_indexed | 2024-03-09T12:40:52Z |
| format | Article |
| id | doaj.art-668ebeba04ea4271ad7c7853c10f39eb |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-09T12:40:52Z |
| publishDate | 2022-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-668ebeba04ea4271ad7c7853c10f39eb2023-11-30T22:18:50ZengMDPI AGSensors1424-82202022-03-01226228810.3390/s22062288Inkjet-Printed Functionalization of CMUT-Based CO<sub>2</sub> SensorsDovydas Barauskas0Donatas Pelenis1Mindaugas Dzikaras2Marius Mikolajunas3Gailius Vanagas4Darius Virzonis5Panevezys Faculty of Technology and Business, Kaunas University of Technology, 44249 Kaunas, LithuaniaPanevezys Faculty of Technology and Business, Kaunas University of Technology, 44249 Kaunas, LithuaniaPanevezys Faculty of Technology and Business, Kaunas University of Technology, 44249 Kaunas, LithuaniaPanevezys Faculty of Technology and Business, Kaunas University of Technology, 44249 Kaunas, LithuaniaPanevezys Faculty of Technology and Business, Kaunas University of Technology, 44249 Kaunas, LithuaniaPanevezys Faculty of Technology and Business, Kaunas University of Technology, 44249 Kaunas, LithuaniaThe trade-off between the functionalization shift of the informative parameters and sensitivity of capacitive micromachined ultrasound transducers (CMUT)-based CO<sub>2</sub> sensors is addressed, and the CMUT surface modification process by thin inkjet-printed polyethyleneimine (PEI) films is optimized. It was shown that by the proper preparation of the active CMUT surface and properly diluted PEI solution, it is possible to minimize the functionalization shift of the resonance frequency and the quality of the resonance and preserve the sensitivity potential. So, after optimization, we demonstrated 23.2 kHz frequency shift readings of the sensor with 16 MHz nominal frequency while in the gas chamber and switching between pure N<sub>2</sub> and CO<sub>2</sub>. After testing the sensors with different PEI film thickness, it was confirmed that a 200 nm average thickness of a PEI film is an optimum, because this is the practical limit of CO<sub>2</sub> absorption depth at given conditions. Additionally, we note that modification of the hydrophilic/hydrophobic properties of the CMUT surface allows changing the nanoscale surface roughness of the printed PEI film and controlling the area resolution of the inkjet functionalization by reducing the diameter of a single dot down to 150 μm by a commercially available printer cartridge.https://www.mdpi.com/1424-8220/22/6/2288carbon dioxide sensingcapacitive micromachined ultrasound transducerspolyethyleneiminesilicon micromachininginkjet printingsurface functionalization |
| spellingShingle | Dovydas Barauskas Donatas Pelenis Mindaugas Dzikaras Marius Mikolajunas Gailius Vanagas Darius Virzonis Inkjet-Printed Functionalization of CMUT-Based CO<sub>2</sub> Sensors Sensors carbon dioxide sensing capacitive micromachined ultrasound transducers polyethyleneimine silicon micromachining inkjet printing surface functionalization |
| title | Inkjet-Printed Functionalization of CMUT-Based CO<sub>2</sub> Sensors |
| title_full | Inkjet-Printed Functionalization of CMUT-Based CO<sub>2</sub> Sensors |
| title_fullStr | Inkjet-Printed Functionalization of CMUT-Based CO<sub>2</sub> Sensors |
| title_full_unstemmed | Inkjet-Printed Functionalization of CMUT-Based CO<sub>2</sub> Sensors |
| title_short | Inkjet-Printed Functionalization of CMUT-Based CO<sub>2</sub> Sensors |
| title_sort | inkjet printed functionalization of cmut based co sub 2 sub sensors |
| topic | carbon dioxide sensing capacitive micromachined ultrasound transducers polyethyleneimine silicon micromachining inkjet printing surface functionalization |
| url | https://www.mdpi.com/1424-8220/22/6/2288 |
| work_keys_str_mv | AT dovydasbarauskas inkjetprintedfunctionalizationofcmutbasedcosub2subsensors AT donataspelenis inkjetprintedfunctionalizationofcmutbasedcosub2subsensors AT mindaugasdzikaras inkjetprintedfunctionalizationofcmutbasedcosub2subsensors AT mariusmikolajunas inkjetprintedfunctionalizationofcmutbasedcosub2subsensors AT gailiusvanagas inkjetprintedfunctionalizationofcmutbasedcosub2subsensors AT dariusvirzonis inkjetprintedfunctionalizationofcmutbasedcosub2subsensors |