A Simple Fabrication Process based on Micro-Masonry for the Realization of Nanoplate Resonators with Integrated Actuation and Detection Schemes

A Simple Fabrication Process based on Micro-Masonry for the Realization of Nanoplate Resonators with Integrated Actuation and Detection Schemes

In this work, we use the micro-masonry technique to fabricate nanoplate resonators with integrated electrostatic actuation and capacitive detection in a few steps. Our approach is an alternative solution to the current fabrication methods used to create membranes and plates that usually rely on the...

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Bibliographic Details
Main Authors: Liviu eNicu, Thierry eLeichle, Seok eKim, Bernard eLegrand, Fabrice eMathieu, Hohyun eKeum, Adhitya eBhaswara
Format: Article
Language:English
Published: Frontiers Media S.A. 2016-03-01
Series:Frontiers in Mechanical Engineering
Subjects:
resonators
Capacitive sensing
Electrostatic actuation
micro-masonry
Nano-plates
Online Access:http://journal.frontiersin.org/Journal/10.3389/fmech.2016.00001/full

Internet

http://journal.frontiersin.org/Journal/10.3389/fmech.2016.00001/full

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