The edge-coupler of fiber-to-chip with ultra-low coupling loss based on double-layer silicon waveguides
The edge-coupler of fiber-to-chip with ultra-low coupling loss is demonstrated on SOI platform. The edge-coupler is consisted of the cantilevered SiO2 waveguide, the amorphous silicon (α-Si) nano taper and the crystal silicon (c-Si) nano tapers. The thin α-Si layer is deposited on the c-Si layer to...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Frontiers Media S.A.
2022-10-01
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| Series: | Frontiers in Physics |
| Subjects: | |
| Online Access: | https://www.frontiersin.org/articles/10.3389/fphy.2022.1018624/full |