A relationship between unbalance vibration compensators for five-axes active magnetic bearing systems and vibration suppression utilized its relation

An active magnetic bearing (AMB) is utilized widely in vacuum apparatuses such as a turbo molecular pump (TMP). The rotor supported by the AMB in the TMP is vibrated by the unbalance of the mass of the rotor, the electromagnetic force of the AMB and the location of the AMB. As the methods to suppres...

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Bibliographic Details
Main Authors: Taiki NAKAMURA, Shinji WAKUI
Format: Article
Language:Japanese
Published: The Japan Society of Mechanical Engineers 2016-04-01
Series:Nihon Kikai Gakkai ronbunshu
Subjects:
Online Access:https://www.jstage.jst.go.jp/article/transjsme/82/837/82_15-00607/_pdf/-char/en