Fabrication of MEMS-based 3D-μECoG-MEAs

Fabrication of MEMS-based 3D-μECoG-MEAs

The microfabrication and packaging of novel, three-dimensional, polyimide-based, highly flexible, microscale electrocorticography multi-electrode arrays for enhanced epicortical recording of local field potentials is presented. A polyimide foil embeds metallic structures relating to 32 taper-type el...

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Bibliographic Details
Main Authors: Deckert Martin, Lippert Michael, Takagaki Kentaroh, Brose Andreas, Ohl Frank, Schmidt Bertram
Format: Article
Language:English
Published: De Gruyter 2016-09-01
Series:Current Directions in Biomedical Engineering
Subjects:
electrocorticography
microelectrode
polyimide
snr
three-dimensional
Online Access:https://doi.org/10.1515/cdbme-2016-0021

Internet

https://doi.org/10.1515/cdbme-2016-0021

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