XPS chemical state mapping in opto- and microelectronics

The strength of XPS imaging lies in its ability to (i) locate small patterns on sample surface, and (ii) inform, with micrometric lateral resolution, about the chemical environment of the elements detected at the surface. In this context, strontium-based perovskites appear to be well-adapted for suc...

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Bibliographic Details
Main Authors: Frégnaux Mathieu, Bourlier Yoan, Berini Bruno, Dumont Yves, Aureau Damien
Format: Article
Language:English
Published: EDP Sciences 2022-01-01
Series:EPJ Web of Conferences
Online Access:https://www.epj-conferences.org/articles/epjconf/pdf/2022/17/epjconf_jnspe2022_01012.pdf