Nanoscale electro-structural characterisation of ohmic contacts formed on p-type implanted 4H-SiC
<p>Abstract</p> <p>This work reports a nanoscale electro-structural characterisation of Ti/Al ohmic contacts formed on p-type Al-implanted silicon carbide (4H-SiC). The morphological and the electrical properties of the Al-implanted layer, annealed at 1700°C with or withou...
Main Authors: | Saggio Mario, Zanetti Edoardo, Frazzetto Alessia, Giannazzo Filippo, Lo Nigro Raffaella, Di Franco Salvatore, Bongiorno Corrado, Raineri Vito, Roccaforte Fabrizio |
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Format: | Article |
Language: | English |
Published: |
SpringerOpen
2011-01-01
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Series: | Nanoscale Research Letters |
Online Access: | http://www.nanoscalereslett.com/content/6/1/158 |
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